Overview of aluminum nitride ceramics

Aluminum Nitride Ceramic is an advanced ceramic material with aluminum nitride as the main component. It has been widely used in electronics, optics, and mechanics due to its unique properties.

Features of aluminum nitride ceramics

High thermal conductivity: Aluminum nitride ceramics have relatively high thermal conductivity, usually between 170-260 W/m·K, which makes it an excellent heat dissipation material. It is especially suitable for electronic devices that require efficient heat dissipation, such as substrate materials for power semiconductor devices.

Good electrical insulation: Despite its high thermal conductivity, aluminum nitride ceramics are excellent insulators of electricity, which can effectively prevent current leakage and ensure the safe operation of electronic components.

Low dielectric constant and dielectric loss: These characteristics make aluminum nitride ceramics very suitable for use in high-frequency circuits because it can reduce energy loss during signal transmission.

High temperature resistance: Aluminum nitride ceramics can maintain structural stability and strength at extremely high temperatures. Its melting point is about 2800°C, so it is suitable for applications in high temperature environments.

Low thermal expansion coefficient: Compared with semiconductor materials such as silicon, aluminum nitride has a lower thermal expansion coefficient, which means it has better dimensional stability when the temperature changes, which helps improve packaging reliability.

Corrosion resistance: Aluminum nitride ceramics have good chemical stability to most molten metals and are not easily oxidized or corroded, allowing them to perform well in harsh environments.

High mechanical strength: Although not as hard as some other types of ceramic materials, aluminum nitride ceramics still provide enough mechanical strength to allow them to be used in many structural applications.

(AlN Heating Element Aluminum Nitride Ceramic Heater for Semiconductor Instrument)

Specifications of AlN Heating Element Aluminum Nitride Ceramic Heater for Semiconductor Instrument

The AlN Heating Element is a high-performance ceramic heater made for semiconductor tools. It makes use of aluminum nitride (AlN) ceramic material. This product supplies outstanding warm transfer and electrical insulation. The heater operates in temperatures as much as 1200 ° C. It maintains steady efficiency even under fast home heating or cooling. The thermal conductivity of AlN ceramic is around 170-200 W/m · K. This ensures even warmth distribution throughout the heating surface.

The heating unit’s structure is compact and light-weight. It fits into tight areas in accuracy devices. The surface area finish is smooth. This avoids contamination in cleanroom settings. The aspect stands up to chemical deterioration from acids, alkalis, and gases. This makes it suitable for hostile semiconductor processes like CVD or etching.

Electrical insulation is a key attribute. The AlN ceramic has a high dielectric stamina. It decreases current leak in high-voltage applications. The heating system operates at voltages from 100V to 480V. Power densities vary from 10 W/cm ² to 40 W/cm ². Custom-made shapes and sizes are readily available. Usual setups consist of round, rectangular, or multi-zone layouts.

Fast response times are attained via reduced thermal mass. The heater reaches target temperatures in secs. Temperature control accuracy is within ± 1 ° C. This accuracy supports sensitive semiconductor production actions. The material’s reduced thermal development matches silicon wafers. This reduces stress and anxiety throughout thermal cycling.

The heating unit integrates with basic control systems. It deals with thermocouples or RTD sensing units. Lengthy life span is guaranteed because of AlN’s longevity. It stands up to repeated thermal shocks without splitting. Applications consist of wafer handling, vacuum cleaner chambers, and logical instruments.

Customization alternatives cover lead arrangements, installing openings, and finish products. The heating system meets ISO Class 5 cleanroom criteria. It works with inert and reactive ambiences. Integrity in rough problems makes it a preferred selection for semiconductor manufacturers.

(AlN Heating Element Aluminum Nitride Ceramic Heater for Semiconductor Instrument)

Applications of AlN Heating Element Aluminum Nitride Ceramic Heater for Semiconductor Instrument

AlN burner made from aluminum nitride ceramic are crucial parts in semiconductor tools. These components take care of high heat and require accurate control. Light weight aluminum nitride has high thermal conductivity. This allows heat spread uniformly throughout the surface. It stops locations that could harm sensitive parts. Semiconductor devices like wafer handling systems count on consistent temperatures. AlN heating systems function well below. They maintain temperature levels stable during steps like deposition, etching, or annealing.

These heaters work in difficult conditions. They take care of temperatures over 1000 ° C without breaking down. Aluminum nitride stands up to chemical reactions with gases or plasmas utilized in chip-making. This stops contamination. Semiconductor tools often run in vacuum chambers. AlN heating units execute well in low-pressure atmospheres. They don’t launch gases or fragments that might harm the procedure.

AlN ceramic is electrically protecting. This stops short circuits in tools where electrical power and warm mix. The product also cools quick after heating. This speeds up production cycles. Faster cooling indicates more sets can be refined daily.

Toughness matters in semiconductor production. AlN heaters last longer than steel or other ceramic heaters. They withstand thermal shock from abrupt temperature changes. Machines run much longer without picking up repair services. This reduces downtime and costs.

Size and shape adaptability assistance as well. AlN heating systems can be made slim or formed right into intricate styles. This fits tight rooms in advanced devices. Engineers save area while maintaining performance high.

Power effectiveness is another advantage. Light weight aluminum nitride relocates heat rapidly. Less power is wasted reaching target temperatures. This lowers energy costs and sustains greener procedures.

Semiconductor makers need dependability. AlN burner supply accurate heat control, chemical resistance, and lengthy life. These traits make them optimal for advanced chip production. They meet the needs of modern semiconductor instruments consistently.

Company Introduction

Advanced Ceramics founded on October 17, 2014, is a high-tech enterprise committed to the research and development, production, processing, sales and technical services of ceramic relative materials and products.. Since its establishment in 2014, the company has been committed to providing customers with the best products and services, and has become a leader in the industry through continuous technological innovation and strict quality management.

Our products includes but not limited to Silicon carbide ceramic products, Boron Carbide Ceramic Products, Boron Nitride Ceramic Products, Silicon Carbide Ceramic Products, Silicon Nitride Ceramic Products, Zirconium Dioxide Ceramic Products, Quartz Products, etc. Please feel free to contact us.(nanotrun@yahoo.com)

Payment Methods

T/T, Western Union, Paypal, Credit Card etc.

Shipment Methods

By air, by sea, by express, as customers request.

5 FAQs of AlN Heating Element Aluminum Nitride Ceramic Heater for Semiconductor Instrument

What makes aluminum nitride (AlN) good for semiconductor heaters?
Aluminum nitride has high thermal conductivity. It moves heat fast and spreads it evenly. This stops hot spots. AlN resists extreme temperatures and chemical reactions. It works well in vacuum settings. These traits make it reliable for precise heating in semiconductor tools.

What temperature range does the AlN heater handle?
The AlN heater works from room temperature up to 800°C. Some designs reach higher. It keeps steady performance across this range. Stability matters for processes like wafer heating or chemical vapor deposition.

How long does the AlN heater last?
Lifespan depends on usage. Proper setup and regular checks help it last years. AlN resists wear from heat cycles and chemicals. Avoid mechanical stress or sudden temperature swings to extend its life.

Can the AlN heater work with corrosive gases?
Yes. Aluminum nitride resists many corrosive gases and plasmas. It suits etching or deposition steps in semiconductor making. Check compatibility for specific gas types before long-term use.

Can the heater’s size or shape be customized?
Yes. AlN heaters come in standard sizes but can be tailored. Custom shapes fit unique tool layouts. Power ratings and wiring setups adjust to different needs. Share device specs with the maker for a perfect match.

(AlN Heating Element Aluminum Nitride Ceramic Heater for Semiconductor Instrument)